摘要
高分辨率步进扫描投影光刻机中掩模台长行程直线电机采用气浮轴承支撑实现亚微米级定位的高速高精运动。考虑精密气浮直线电机结构中气固耦合对直线电机运动精度可能产生的影响,用拉格朗日方法建立了精密直线电机12个自由度的动力学模型。仿真计算结果和模态试验结果的主要模态偏差均小于5%,且识别出该系统中气浮轴承在平衡位置附近的线性化刚度。仿真计算和模态试验相结合建立的高精密直线电机动力学模型是正确有效的。
The long stroke linear motor of reticle stage in high-resolution step ＆ scan projection-lithography machine utilizes the air-bearings to achieve high-speed and hlgh-precision motion with submieron positioning aecuraey. With respect to the effect of the characteristic of gas-solid couple on motion accuracy of the linear motor, this paper establishes a 12-DOF dynamic model with of the precision linear motor by Lagrange Equations. The main mode deviation between the simulation results and modal experiment results is 5 % below. The linear stiffness of the air-bearing is also identified at the equilibrium position. The established dynamic model of the high precision linear motor is accurate and applicable to the real structure experimental results.
出处
《武汉理工大学学报》
EI
CAS
CSCD
北大核心
2008年第5期117-121,共5页
Journal of Wuhan University of Technology
基金
国家重点基础研究发展规划项目(973计划)(2003CB716206)
国家自然科学基金项目(50605025)
湖北省杰出人才创新基金项目
关键词
精密直线电机
气固耦舍
动力学模型
仿真
模态试验
precision linear motor
gas-solid coupling
dynamic model
simulation
modal experiments
