摘要
针对小电容压电陶瓷特有的迟滞曲线,建立实验系统采集压电陶瓷微位移器的位移-电压数据,然后用最小二乘法建立数学模型;通过计算机程序控制压电陶瓷驱动电压,实现了白光干涉检测仪微位移系统的开环控制,总位移20μm,精度可达0.03μm,并且给出了控制程序的流程图。
The piezoelectric ceramics of little capacitance have a simple hysteresis, for which a special mathematic model with least square method can be established, using the data obtained by a particular experiment system. Then a computer program based on the model makes the open loop control to tiny displacement system of detecting apparatus based on white - light interference technique. The total displacement length is 20 and the precision reaches 0. 03. In addition, the flow chart of the program is given.
出处
《南昌航空大学学报（自然科学版）》
CAS
2008年第1期49-53,93,共6页
Journal of Nanchang Hangkong University(Natural Sciences)
基金
江西省自然科学基金资助项目(0612049)
关键词
压电陶瓷
微位移
迟滞现象
数学建模
piezoelectric ceramics
tiny displacement
hysteresis
mathematic modeling
