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悬浮式双镀膜冷却辊连续镀膜设备的研制 被引量:1

Research and Development of Suspended Double Cooling Roll Continuous Deposition Equipment
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摘要 高真空悬浮式双镀膜冷却辊连续镀膜设备的研制生产彻底解决了传统的单镀膜冷却辊镀膜对薄膜材料造成的局部起褶暴筋和产生白条纹(镀空线)的问题,显著提高了镀膜速度和产品质量,降低了废口率,为新一代真空连续镀膜设备开辟了新的应用领域和市场前景.本文主要介绍了高真空悬浮式双镀膜冷却辊连续镀膜设备的原理、组成、性能及工作过程,并对相关问题进行了讨论分析. Research and production of high vacuum suspended double cooling roll continuous deposition equipment resolved thin-film material partial wrinkle and space stripe defects of traditional single cooling roll deposition thoroughly, and improved deposition speed and quality of production. The rate of waste products was decreased simultaneously. This new vacuum continuous deposition equipment will establish new application field. The principle, composition, performance and working process of suspended double cooling roll continuous deposition equipment are introduced, and several related questions are discussed and analyzed.
出处 《兰州交通大学学报》 CAS 2008年第1期67-70,共4页 Journal of Lanzhou Jiaotong University
关键词 悬浮式 双镀膜冷却辊 连续 镀膜 坩埚 均匀性 suspended double cooling roll continuous deposition melting pot uniformity
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参考文献2

  • 1李云奇主编..真空镀膜技术与设备[M].沈阳:东北工学院出版社,1989:293.
  • 2达道安主编..真空设计手册 第3版[M].北京:国防工业出版社,2004:1678.

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