摘要
提出了波导多层光卡的一种模压制作方法。该方法以聚碳酸脂(PC)作为芯层,聚二甲基硅氧烷(PDMS)作为包层。首先通过传统的光刻过程制作带有信息的金属母板,然后用金属母板在PC表面压印信息坑,再在PC薄膜表面均匀地旋涂PDMS使之形成复合片,最后将多个复合片叠合在一起形成波导多层光卡。通过光源侧向耦合实验观察,获得的光卡样品的数据图像清晰,表明这是一种可行的多层光卡制作方法。
A method to fabricate the multilayer optical card（WMOC） using the moulding technique is introduced in this paper. The struct of the WMOC is consisted with Polycarbonate（PC） as the core layer material and Polydimethylsiloxane （PDMS） as cladding layer. First, the traditional photolithography method is taken to make metal pattern. Then the information is translated from the mental pattern to a PC pattern,and the PDMS is coated onto the surface of PC to constitute a multi-pattern. When putting several multi-patterns together, a WMOC is then completed at last, Many pictures captured from the side scattering readout experiment are shown in the paper. They demonstrate the moulding fabrication method is feasible and effective.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2008年第4期447-448,共2页
Journal of Optoelectronics·Laser
基金
国家自然科学基金资助项目(60377006)
上海市科委光科技专项资助项目(036105033)
关键词
波导多层
光卡
模压法
聚二甲基硅氧烷(PDMS)
waveguide multilayer
optical card
moulding fabrication method
polydimethylsiloxane（PDMS）
