摘要
研制成功离子渗氮及等离子热处理用ＩＧＢＴ逆变型脉冲电源。本文介绍了其原理、关键技术、主要技术指标、特点及应用情况。该电源频率高，灭弧速度快，能显著减弱或抑制空心阴极效应，节约电能，并可提高等离子增强化学气相沉积（ＰＣＶＤ）涂层的质量。
A kind of pulsed power supply with IGBT inverter for plasma nitriding and plasma heat treatment was made The principle,key technology,main technological indexes,characteristic and application of the pulsed power supply were introduced in this paper It has a number of advantages such as high frequency,cutting off arc discharge quickly,repressing the effect of the hollow cathode obviously,saving energy,and improving the quality of the layers by plasma enhanced chemical vapour deposition(PCVD)
出处
《金属热处理》
CAS
CSCD
北大核心
1997年第11期14-17,共4页
Heat Treatment of Metals
