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基于NURBS自由曲面插值的IC芯片数字图像放大方法研究

Study on image enlarging technology for IC chip topography based on NURBS free surface interpolation
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摘要 本文在论述图像放大技术在计算机芯片检测中的重要性基础上,提出基于非均匀有理B样条(NURBS)自由曲面的数字图像插值放大方法,通过像素点位置坐标灰度值建立三维坐标系以及NURBS曲面,确定新插入点的像素灰度值从而获得放大图像。理论研究与实验结果表明,此方法能够获得稳定清晰的IC芯片表面特征放大数字图像,以便用于后续的图像研究处理工作。 After discussing the importance of image enlarging technology in the course of IC chip's optical detecting, this paper investigates a new image enlarging technology based on NURBS free surface interpolation. It uses image pixels' coordinates and gray level to build up a NURBS surface,and then determines gray value of interpolated points. Experimental result shows that this technology can obtain a stable and clear enlarging image of IC chips; As a result, further process on the image is facilitated.
出处 《电子测量技术》 2008年第2期34-38,共5页 Electronic Measurement Technology
关键词 数字图像 NURBS自由曲面 图像插值放大 IC芯片 digital image NURBS free surface image interpolate enlarge IC chip
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