摘要
绝缘体上硅(SOI)是纳米技术时代的高端硅基材料。详细介绍了SOI在半导体技术领域中的应用,以及近年来为满足SOI的特殊应用要求研发的多种SOI新材料及其制备技术;综述了绝缘体上应变硅(sSOI),绝缘体上锗(GOI)等SOI技术的现状和发展动向;最后,对SOI技术的发展前景进行了展望。
Sihcon-On-Insulator （SOD is an advanced silicon-based material for Nanotechnology Era. Applications of SOl in microelectronics are described in detail. A variety of novel SOI materials for specific applications is examined, along with their fabrication technologies. The state-of-the-art of SOI technology, including strained silicon-on- insulator （sSOI） and germanium-on-insulator （GOI）, is reviewed. And finally, the development trend and future prospect of SOI technologies are discussed.
出处
《微电子学》
CAS
CSCD
北大核心
2008年第1期44-49,共6页
Microelectronics
关键词
高端硅基材料
绝缘体上硅
绝缘体上应变硅
绝缘体上锗
Advanced silicon-based material
Silicon on insulator （SOI）
Strained silicon on insulator（sSOI）
