摘要
介绍了一种用于飞行时间质谱仪的新型辉光放电离子源。该离子源在微秒级脉冲(瞬短脉冲)模式下工作。实验结果表明,瞬短脉冲辉光放电的电流比直流辉光放电有数量级的提高。对瞬短脉冲辉光放电离子源与质谱仪的接口的结构要求相当苛刻,必须用一块可加工陶瓷片屏蔽采样板,把采样板与辉光放电的阳极隔开,才能达到良好的真空及溅射。以黄铜为样品,瞬短脉冲辉光放电的瞬时溅射率达到24.4μg/s·mm2。就黄铜样品的典型谱图进行了讨论。
This paper describes a new type of glow discharge (GD) ion source coupled to a time of flight mass spectrometer (TOFMS). The GD ion source is operated under microsecond pulse (μs-pulse) mode. The experimental results show that the discharge current of μs-pulse mode can be one order of magnitude higher than that of the DC mode. The structure requirement of the interface between μs- pulse GD ion source and TOFMS is critical. in order to obtain good vacuum and sputtering, a Macor disc must be used to separate the sampling Plate from the anode of GD. The transient sputtering rate of μs-pulse mode is 24.4 μg/s. mm2 for brass samples. The typical mass spectra of brass samples are presented and discussed.
出处
《分析仪器》
CAS
1997年第3期13-18,共6页
Analytical Instrumentation