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单晶生长炉全局热分析(1)--三维模型建立 被引量:3

GLOBAL ANALYSIS OF HEAT TRANSFER IN CZ SINGLE CRYSTAL GROWTH FURNACE (1):DEVELOPMENT OF UNSTEADY THREE-DIMENSIONAL MODEL
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摘要 晶体生长炉内高温热辐射和熔液对流十分复杂,使分析整个生长炉内传输现象的全局热分析模型一直停留在轴对称准静态假定上.本文考虑熔液对流的三维性和非定常性,构筑了三维全局热分析模型,讨论了熔液对流三维性和非定常性的影响。结果表明:本文模型预测的晶体成长界面反转临界雷诺数大大降低,更接近实际。 Thermal radiation and melt convection in CZ single crystal growth furnace are extremely complicated and make the model of global analysis of transport phenomena inside the whole growth furnace have been established on axisymmetrical and pseudo-steady assumptions. In this paper a threedimensional global analysis of heat transfer by considering unsteady three-dimensional melt flow was developed, and the effect of unsteady three-dimensional melt flow was discussed. The results indicate that the predicted critical rotation Reynolds number at which the crystal/melt interface reverses is greatly lowered down close to the practical.
出处 《工程热物理学报》 EI CAS CSCD 北大核心 2008年第2期306-308,共3页 Journal of Engineering Thermophysics
基金 国家自然科学基金项目(No.50576079)
关键词 全局热分析 熔体对流 内部热辐射 界面反转 global analysis of heat transfer melt convection internal radiation interface reversal.
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参考文献2

  • 1Kobayashi M, Hagino T, Tsukada T, et al. Effect of Internal Radiative Heat Transfer on Interface Inversion in Czochralski Crystal Growth of Oxides. J. Crystal Growth, 2002, 235:258-270. 被引量:1
  • 2Jing C J, Tsukada T, Hozawa M, et al. Numerical Stud- ies of Wave Pattern in an Oxide Melt in the Czochralski Crystal Growth. J. Crystal Growt, 2004, ~265: 505-517. 被引量:1

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