摘要
根据潘宁放电机理，导出溅射离子泵抽速的理论公式。讨论了抽速对各种放电参数的依赖关系。计算了离子泵对Ｎ２和ＣＯ的抽速。计算结果和实验测试以及经验公式的结果有较好的符合。
According to the mechanism of the Penning discharge,deduce the theoretical formula of an ion pumps pumping speed,discuss the dependence of the pumping speed on several discharge parameters,and calculate the pumping speed for N 2 or CO.The calculating results agree well with exeperimental results and the empirical formulas.
出处
《真空与低温》
1997年第2期100-103,共4页
Vacuum and Cryogenics
关键词
放电
抽速
真空泵
溅射离子泵
Penning discharge,Sputtering yield,Sticking probability,Ion pumps pumping speed.
