摘要
本文提出了拖动分子泵的自泄漏模型，并利用该模型讨论了分子流状态下，拖动泵的槽间泄漏对压缩比的影响及其对策。理论结果与实测值符合得很好。自泄漏模型为发展新一代高抽速、高流量分子泵提供了重要的理论基础。
Abstract A model of self leakage in molecular drag pumps(MDP) is set up. Effects of leakage between two neighboring pumping channels to compression ratio are discussed detailly in molecular state by using the model. Theoritical results agree well with experimental data. The model provides a good method to develop a new generation of molecular drag pumps with high pumping speed and large throughput.
出处
《真空》
CAS
北大核心
1997年第4期21-26,共6页
Vacuum
