摘要
金属氧化物半导体由于具有耐热、耐腐蚀、成本低廉等特点,常用于制作气体传感器的敏感元件。本文简要介绍了SnO_2半导体材料、TiO_2半导体材料作为一氧化碳敏感材料的最新研究进展。
The metal oxide semiconductors were commonly used as gas sensor sensitive components owing to their heat and corrosion resistance, low cost, and other feature. Recent advances in SnO2 semiconduetor materials and TiO2 semiconductor materials with sensitivity towards carbon monoxide was introdueed in this paper.
出处
《气象水文海洋仪器》
2007年第4期57-59,共3页
Meteorological,Hydrological and Marine Instruments