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透明导电薄膜概述 被引量:4

Introduction of the Transparent Conductive Oxide Film
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摘要 系统的介绍了导电膜分类,并着重描述了第二代光学透明导电隐身膜系 ITO 薄膜的结构、电学性能、光学性能。指出目前国内外的研究重点以及低温成膜技术是 ITO 研究的方向。 The article introduced the classification of the TCO and the structure, electricity performance, optical performance of the ITO film, proposed the research emphasis, and pointed out that coating under low temperature would be the development tendency.
作者 王慧 刘静
出处 《陶瓷》 CAS 2007年第12期12-13,17,共3页 Ceramics
关键词 透明导电隐身膜 ITO薄膜 低温成膜 TCO ITO film Low working temperature
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  • 2管自生,张强.激光刻蚀硅表面的形貌及其对浸润性的影响[J].化学学报,2005,63(10):880-884. 被引量:19
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