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基于耦合模-电网络理论的S型SAW器件特性分析

Analysis on Characteristics of S-type Surface Acoustic Wave Device Based on Coupled-Mode and Electric Network Theory
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摘要 为克服马松(Mason)等效电路模型指对级联及常用电路仿真软件处理复阻抗的繁杂性,提出了应用耦合模理论和电网络理论分析声表面波(SAW)器件特性的方法,它首先应用耦合模理论获得叉指换能器SAW粒子运动速度和应力的关系式,由此得到叉指换能器的等效电路模型,并根据耦合模理论计算等效电路模型中各电参量值,然后应用电路网络理论推导等效电路模型各节点电压方程,结合自行研制的S型SAW器件尺寸,仿真得到S型SAW器件的频率特性,与实验得到的频率特性基本相近。 A method to analyses frequency characteristics of surface acoustic wave(SAW) device is proposed using coupled-mode and electric network theory to avoid cascade Mason equivalent circuit of a pair strip and its imaginary impedance equivalence when using circuit simulation soft. A equivalent circuit mode of interdigital transducer (IDT) is obtained by relation expression of particle velocities and the forces at the acoustical ports based on coupledmode theory, Then, nodes voltage equations are derived after electric parameters of the equivalent circuit are calculated and the frequency characteristics of the S-type surface acoustic wave device are simulated , which is nearly to measurement results.
出处 《压电与声光》 CAS CSCD 北大核心 2007年第6期628-631,共4页 Piezoelectrics & Acoustooptics
基金 宁波市自然科学基金资助项目(2007A610005) 宁波大学校基金资助项目(XY0600048)
关键词 声表面波器件 耦合模理论 等效电路 surface acoustic wave device coupled-mode theory equivalent circuit
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参考文献9

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