摘要
多端口组件网络方法可以实现MEMS器件系统级的快速设计与仿真。本文利用该方法,在SABER仿真平台上搭建了MEMS固态引信谐振器的系统级行为模型,并进行了小信号频域仿真、时域仿真以及灵敏度仿真,其结果接近于有限元分析结果。表明采用多端口组件网络方法进行MEMS器件的设计,可以满足设计要求,保证精度,提高设计效率。
The fast design and simulation of system-level for MEMS devices can be achieved by the Multi-Portelement network method. Based on this method, a system-level behavioral model of MEMS solid state fuze resonance was build on SABER platform, and simulations such as small single frequency domain, time domain and sensitivity were analyzed. The results are agreed well with that by ANSYS, and show that MuPEN method can be applied for the design of MEMS devices to satisfy the requirement, guarantee the precision and improve the efficiency greatly.
出处
《科技广场》
2007年第9期10-12,共3页
Science Mosaic
关键词
固态引信
多端口组件网络:系统级仿真
Solid State Fuze
Multi-Port-Element Network
System-level Simulation
