摘要
为提高α-Al2O3磨粒在水基介质中的分散稳定性,采用接枝聚合方法制备了Al2O3-g-聚丙烯酰胺复合粒子。采用FTIR、XPS、TOF-SIMS、激光粒度仪、SEM、沉降试验等对氧化铝复合粒子结构及分散性能等进行了表征。结果表明,聚丙烯酰胺以化学键形式接枝到Al2O3粒子表面,形成聚丙烯酰胺为壳,Al2O3为核的复合磨粒;接枝改性后的Al2O3粒子分散性明显提高,并且其分散性与Al2O3表面接枝量密切相关。
In order to enhance the dispersion stability of alumina abrasive in chemical mechanical polishing （CMP） slurry, the alumina particles grafted with polyacryamide were prepared. The resulting composite particles were characterized by means of FTIR, XPS, TOF-SIMS, SEM and laser particle size analyzer as well as settlement test. The results indicated that polyacryamide chain was grafted onto the surface of Al2O3 particles to form the core/shell type structure with alumina particles as core and polyacryamide chains as shell. The prepared composite abrasive in deionized water exhibited better dispersibility and dispersion stability than pure alumina abrasive. The dispersibility of the composite abrasive was much dependent on the the average diameter of the composite particles decreased with the grafting ratio. grafting ratio of polyacryamide,
出处
《无机化学学报》
SCIE
CAS
CSCD
北大核心
2007年第10期1763-1766,共4页
Chinese Journal of Inorganic Chemistry
基金
国家自然科学基金(No.50575131)
国家973计划(No.2003CB716201)资助项目
关键词
Al2O3磨粒
接枝聚合
分散性
化学机械抛光
Al2O3 abrasive
grafting polymerization
dispersibility
chemical mechanical polishing
