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微构件力学性能测试技术进展 被引量:3

Research Situation and Trend of Mechanical Testing of Micro Structures
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摘要 阐述了微构件力学性能的研究现状与存在的力学性能参数表征问题,而后重点介绍了微构件力学性能测试中相关的驱动方式、微位移检测和微力检测技术。 This paper firstly presented the recent research situations in the micromechanics testing technique and the problems in characterization of mechanics properties. Then the techniques about actuators, micro displacement sensors, and micro force sensors were discussed and compared respectively as they were main parts in microscale mechanics testing.
出处 《中国机械工程》 EI CAS CSCD 北大核心 2007年第19期2383-2387,共5页 China Mechanical Engineering
基金 国家自然科学基金资助项目(50535030) 教育部新世纪优秀人才支持计划项目(NCET-04-0266)
关键词 微机电系统 力学性能 驱动 微位移检测 微力检测 MEMS mechanics property actuator micro displacement sensor micro force sensor
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