摘要
研制出光电集成加速度地震检波器及其数字信号处理系统。该检波器将光波导M-Z干涉仪、十字横梁硅质量块简谐振子、光波导偏振器单片集成在同一硅基底上,并与光源、光电探测器、信号处理电路混合集成。数字信号处理系统以TI公司的高性能数字信号处理(DSP)芯片为核心,辅以必要的电路,实现了对加速度信号的高精度检测和误差信号的补偿。完成了实验样机的研制,测试结果表明主要性能指标达到设计要求。
Photo-electronic integrated acceleration seismometer and its digital signal processing system are researched and developed. The silicon crystal is adopted as the substrate. The M-Z interferometer, harmonic oscillator, TE mode polarizer and acousto-optic phase modulation are integrated on the silicon substrate. And the LD, the PIN detecting, processing circuit are hybrid-integrated in the system. As an advanced quality digital signal processing （DSP） chip equipped with necessary circuits is used in its digital signal processing system, a high accurate de- tection of the acceleration signal is achieved and the environmental interference signal is effectively compensated. The prototype is accompleted and tested, and most design requirements are achieved.
出处
《科学技术与工程》
2007年第19期4889-4893,共5页
Science Technology and Engineering
基金
国家自然科学基金项目(40274047)资助
关键词
光电集成
MOEMS
零差补偿
数字信号处理(DSP)
photo-electronic integrated MOEMS homodyne compensation system digital signal processing （DSP）
