摘要
根据外差干涉非线性误差的产生机理,建立了起偏器放置误差和相位延迟误差对非线性误差影响的理论模型,分别分析了起偏器放置误差和相位延迟误差对非线性误差的影响。仿真结果表明,起偏器放置误差引起的非线性误差为二次谐波,起偏器相位延迟偏离π/2会引起激光束的椭圆偏振化,引起一次谐波非线性误差,严重影响非线性误差的大小。当起偏器相位延迟误差为5°时,引起的非线性误差一次谐波达到4.40 nm。
To improve the accuracy of the laser heterodyne interferometric nanometer measurement,the influence of polarizer on nonlinearity and the means to reduce are studied. According to the theroy of nonlinearity in laser heterodyne interferometric,it model of the influence of orientation error and phase retardation error of polarizer on nonlinearity is proposed and analyzed. The simulation results show that the nonlinearity caused by orientation error of polarizer is second-harmonic non- linearity. The laser will be elliptic polarized beam when the phase retardation angle of polarizer departs from 7π/2 ,and it arises the first-harmonic nonlinearity. It is assumed that when the phase retardation error of polarizer is 5°, the first-harmonic nonlinearity is 4. 40 nm.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2007年第4期460-462,共3页
Journal of Optoelectronics·Laser
关键词
激光外差干涉
非线性误差
起偏器
纳米测量
heterodyne interferometer
nonlinearity
polarizer
nanometer measurement
