摘要
本文描述了微机械谐振式硅桥传感器的工作原理,硅桥制作过程以及传感器的工作特性。讨论了传感系统的检测灵敏度与光纤头到硅桥表面距离的关系。实验结果表明,激励硅桥谐振的光功率是在10～450μW,探测信号的光功率在300μW时,其系统的信噪比为25～40dβ,它具有重要的实际应用价值。
The operating principle and characteristics of the micromechanical resonantsilicon bridge sensors and their fabricating method are described in this paper.The relation between the detect sensitivity of the sensing system and the distancebetween the optical fibre end face and the surface of silicon bridge is also discussed.The experimental resuits show that the optical power used to excite the siliconbridge is at levels of 10~450μw, the signal to noise ratio for the detected signal is 25~40 dB at optical power levels is 300μW. It will be of considerable value of practical application.
出处
《光电工程》
CAS
CSCD
1990年第2期28-34,共7页
Opto-Electronic Engineering
关键词
微机械
谐振式
硅桥
传感器
光纤
Resonant sensors, Optical fiber sensors, silicon bridge
