摘要
设计了一种“叉指式”微机械加速度计和相应的闭环检测电路,介绍了此微加速度计的加工工艺,并使用Ansys软件进行了模态分析和机械分析,仿真结果跟理论计算相吻合。最后对该闭环微加速度计进行了测试,得到的测量线性度为2.5%,刻度因子为3V/g。
A kind of comb microaccelerometer and its closed-loop detection circuit are designed ,processing technic of the microaccelerometer is mentioned, Modal analysis and mechanical analysis are carried out with Ansys ,the simulation results match with the theoretical prediction very well. The closed-loop microaccelerometer is tested at last,and the test shows that the measuring linearity of the microaccelerometer is 2.5%,the scale factor is 3V/g.
出处
《微计算机信息》
北大核心
2007年第05Z期214-216,247,共4页
Control & Automation
基金
国家自然科学基金(NO.50375154)
关键词
“叉指式”微加速度计
有限元分析
闭环检测
Comb microaccelerometer, Finite element analysis（FEA）, Closed-loop detection
