摘要
A model of collisional RF sheath with negative ions is discussed in this paper. The influences of collision and negative ions on the parameters of the sheath are studied through numerical simulation. It is found that when the collision coefficient increases and the RF power is fixed, the electrode potential and sheath electric field potential increase, the electrode current and thickness of the sheath decrease. When the negative ion content changes, the same phenomenon Occurs,
A model of collisional RF sheath with negative ions is discussed in this paper. The influences of collision and negative ions on the parameters of the sheath are studied through numerical simulation. It is found that when the collision coefficient increases and the RF power is fixed, the electrode potential and sheath electric field potential increase, the electrode current and thickness of the sheath decrease. When the negative ion content changes, the same phenomenon Occurs,
基金
supported by the National Natural Science Foundation of China(Nos.10375063 and 40336052)
