摘要
通过化学气相沉积的方法,在具有规则微形貌的硅片表面沉积硅的有机物制备出了超疏水表面,进而对表面的润湿性进行了对比。结果表明:不同的成膜时间和微形貌的结构尺寸直接影响着表面的润湿性;表面的接触角随着时间的增长而增大,但有一时间极限,此后接触角基本不受影响;当微形貌深度一定,随着形貌宽度的增加接触角无明显变化,但超过某一临界值时,接触角下降明显,不再形成超疏水表面。
Ultra hydrophobic surface with regular topography were fabricated. Organic silicon were deposited on silicon surface by chemical vapor deposition （CVD）. Wettability of ultra hydrophobic surface was contrasted with smooth surface. The results show that wettability of ultra hydrophobic surface is affected by time of fabricating coating and dimension of to- pography. Apparent contact angle increases with increasing of time, but there is a limit value of time, contact angle isn＇ t af- fected by it. When the depth of topography is a fixed value, contact angle doesn＇ t change with topography width, but there is an evident decline when contact angle arrives a critical value. The surface doesn＇ t form ultra hydrophobic surface.
出处
《润滑与密封》
CAS
CSCD
北大核心
2007年第8期37-38,102,共3页
Lubrication Engineering
基金
国家自然科学基金资助项目(50475018)
关键词
气相沉积
表面形貌
超疏水
vapor deposit
surface topography
ultra hydrophobic
