摘要
传感器对被测对象的负荷效应是微机电系统中不可忽视的一个问题.阐述了负荷效应的基本概念,提出了一种通过实验获取传感器负荷效应的方法,称之为"二减一法",并以聚合酶链式反应芯片内的温度传感器为例详细论述了该方法的具体应用.
The loading effect of sensors is often an inevitable problem in micro-electromechanical systems （MEMS）. The basic concept of loading effect is introduced and a method is proposed by which loading effect of sensors can be got through experiments. The method is called ＂two subtract one＂. As an example it is applied to the measurement and compensation of temperature sensor＇s loading effect in polymerase chain reaction chips.
出处
《传感技术学报》
CAS
CSCD
北大核心
2007年第8期1757-1761,共5页
Chinese Journal of Sensors and Actuators
基金
国家自然科学基金资助(90307003)
山东省自然科学基金资助项目(Y2003G03)
关键词
传感器
负荷效应
微机电系统
聚合酶链式反应
芯片
sensor
loading effect
Micro-Electro Mechanical System（MEMS）
polymerase chain reaction
chip
