摘要
应用离子束混合的方法在GCr15轴承钢底材上制备了Mo薄膜。对Mo膜的元素组成和分布、显微组织形态、相结构以及元素化学态应用俄歇光电子能谱(AES)、透射电子显微镜(TEM)、X-光电子能谱(XPS)剖面分析等方法进行了系统的分析和考察。对Mo膜的显微硬度进行了测量和分析。对镀膜前后材料的磨损性能进行了比较。结果表明,Mo膜系由Mo、MoC纳米微晶构成,MoC微晶相弥散在Mo膜层内。X-光电子能谱深度分析表明,用IBM方法制备的Mo膜,Mo、MoC相弥散在Fe基内。硬度实验显示Mo膜具有较高的显微硬度,这主要归因于Mo膜内晶粒细化和MoC硬质相弥散强化共同作用的结果。摩擦试验显示离子束混合表面改性Mo膜具有较好的抗磨性,其磨损率为底材的1/5。
The molybdenum film was prepared on GCr15 bearing steel substrate by ion beam mixing method. The composition and distributions of elements in film, the microstructure, the microhardness and tribological properties of the film were studide by AES, TEM, XPS etc. Results indicated that the film was composed of Mo and MoC grain, which was at nanometer level size, about 5-10 nm. MoC microcrystal was dispersed in the interface of Mo-Fe mixing area. The microhardness was higher than relevent pure metal, which could be attributed to the effect of grain strengthening and dispersion strengthening. The film had excellent antiwear performance because the wear rate of Mo film was 1/5 of that of GCr15 bearing steel substrate.
出处
《材料保护》
EI
CAS
CSCD
北大核心
1997年第4期6-8,共3页
Materials Protection
