摘要
An improved method of angle measurement is proposed based on a parallel plate interferometer. A position detection system is incorporated into a parallel plate interferometer in order to realize large deflection angle measurement. A reflecting mirror is introduced for increasing the measurement resolution. In experiments, a deflection angle of a measured target was measured within ～3° with high accuracy. And as a phase modulating interferometer, it was used to measure a small angular displacement with a repeatability of 5.5 × 10^-8 rad.
An improved method of angle measurement is proposed based on a parallel plate interferometer. A position detection system is incorporated into a parallel plate interferometer in order to realize large deflection angle measurement. A reflecting mirror is introduced for increasing the measurement resolution. In experiments, a deflection angle of a measured target was measured within ～3° with high accuracy. And as a phase modulating interferometer, it was used to measure a small angular displacement with a repeatability of 5.5 × 10^-8 rad.
基金
This work was supported by the National Natural Science Foundation of China under Grant No.60578051.
