摘要
提出了一种利用热应力改变镜面曲率的可调焦微光学自适应微镜。与传统自适应微镜相比，采用该原理制作的微镜具有驱动电压低和驱动力较大的优点，而且制作简单。以硅为基底进行了表面热氧化、光刻显影、HF酸刻蚀、KOH湿法刻蚀，溅射铝膜等微加工工艺的研究，获得硅铝双金属可调焦微反射镜4×4阵列，单元尺寸3mm×3mm，单晶硅基底厚60μm，硅表面溅射的铝膜厚150nm。该微镜的镜面填充率为100％，可变形镜面占总镜面面积的79％。利用激光波面干涉仪对可调焦微反射镜的动态性能进行了测试。实验表明，该微镜可产生单向连续变形，最大变形量15．8μm，非线性滞后27％，工作电压0～2．5V，可调焦范围∞～0．036m。
A novel adjustable focal-length optical adaptive micro-mirror based on bi-mental effect is presented. Compared with traditional deformable micro-mirror, micro-mirror fabricated by this method has the advantage of low driving voltage and large driving force. Besides, it is easy to be fabricated. Micro-machining processes such as oxygenation,photolithography, chemical etching and sputtering are experimented. A 4 × 4 bi-metal adjustable focal- length micro-mirror arrays have been completed. Each unit has an area of 3 minx 3 mm with the thickness of silicon 60μm and aluminum film 150 nm. Deformable mirror area covers 79% of the total mirror area which is 100%. Dynamic performance of adjustable focal-length micro-mirror is tested using laser wave-front interferometer. Experiment results demonstrate that the micro-mirror can produce uni-directional continuous deformation with the maximum deformation of 15.8 and nonlinearity lag of 27% o It can work at 0-2.5 V with an adjustable focal length ranging from ∞ to 0. 036 m.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2007年第7期1271-1274,共4页
Acta Optica Sinica
基金
航天支撑基金资助课题
关键词
自适应光学
微反射镜
微光机电系统
微光学
adaptive optics
micro-mirror
micro-opto-electro-mechanical-system （MOEMS）
micro-optics
