摘要
通过溶胶凝胶法和旋涂法制备了单层和双层TiO2-KTaO3薄膜,并在不同的温度下退火1h,研究了该薄膜的湿敏传感特性。通过扫描电镜和X射线衍射研究了薄膜的形态特性,发现该薄膜具有纳米颗粒和毛细多孔结构。环境湿度变化从12%RH^97%RH的变化过程中,在500℃下退火的TiO2/KTaO3薄膜具有很高的灵敏度。对比单层薄膜,双层薄膜显示出有更大的电阻变化范围。还研究了TiO2/KTaO3薄膜的湿敏传感机理。
Bilayered and monolayered TiO2-KTaO3 films have been fabricated by sol-gel spin-coating method and heated at deferent temperature for an hour. The humidity-sensing characterizations of the films have been investigated and morphological characterization has been studied by SEM and XRD. It was proved that the films possessed nanosized gains and capillary nanoporous structure. During the relative humidity variation from 12% to 97%, TiO2/KTaO3 films annealed at 500℃ exhibited the highest humidity sensitivity. Compared to monolayered films,the bilayered films show the large change in impedance. The reasons of humidity sensing properties of TiO2-KTaO3 films have also been discussed.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2007年第5期760-763,共4页
Journal of Functional Materials
基金
重庆市自然科学基金资助项目(CSTC2005BB4244)
