摘要
看板是实现拉式派工的有效工具,它可以用于晶圆制造厂清洗区和炉管区之间的动态派工。用Extend仿真建模软件建立了有“重入特性”的晶圆厂仿真模型。通过晶圆厂仿真模型进行模拟,结果显示看板可以解决晶圆生产在清洗工艺后存在违反“等待时间限制”的情况,可以显著提高炉管设备的利用率,并且明显降低产品的生产周期时间。
Kanban is a valid implement for realizing pull dispatching, it can realize dynamic dispatching between cleaning process district and fumace process district in semiconductor wafer fab. A wafer fab model with ＂re-entrance＂ feature was built using extend simulation modeling software. The wafer fab simulation results show that the new method can solve rework problem resulted from violating ＂queuing time limit＂ after cleaning, the fumace utilization is promoted greatly and cycle time is decreased evidently.
出处
《半导体技术》
CAS
CSCD
北大核心
2007年第3期208-212,共5页
Semiconductor Technology
基金
教育部博士点基金项目(20050252008)
上海市重点学科资助项目(T0502)
