摘要
研究了微波电子回旋共振－化学气相沉积ＳｉＮｘ薄膜的光学性能，这种ＳｉＮｘ薄膜具有透光谱宽、透光率高的特点，总结了透光谱、折射率、光隙能随微波功率。
The optical properties of SiN x films prepared by microwave ECR CVD have been investigated.The wide transmission spectrum and high transmissivity of SiN x films are obtained. The effects of microwave power and substrate temperature on transmission spectra, refractive index, optical band gap are analysed.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1997年第4期489-492,共4页
Acta Optica Sinica
关键词
氮化硅
薄膜
光学性能
化学气相沉积
SiN x film, optical property, microwave electron cyclotron resonance chemical vapor deposition.
