摘要
采用PECVD方法制备Fe2O3／SnO2双层气敏薄膜，利用浸渍方法对稀土元素（La，Nd，Sm，Er，Yb）与铝配制的乳浊液进行表面修饰．测试结果表明，修饰后的双层薄膜对乙醇或丙酮具有较高的灵敏度与选择性。
Fe2O3-SnO2 double-layer thin films were prepared by means of plasma enhanced chemicalvapour deposition method. The films were modified by being soaked in an ernulsive solution containingaluminium and rare earth elements (La, Nd, Sm, Er, Yb). The experimental results indicated thatthe modified thin films exibited a hlgh sensitivity and selectivity of to alcohol gas and acetone gas.
出处
《吉林大学自然科学学报》
CAS
CSCD
1997年第1期51-54,共4页
Acta Scientiarum Naturalium Universitatis Jilinensis
关键词
双层薄膜
气敏特性
稀土
二氧化锡
三氧化二铁
double layer film, gas sensitive characteristic, rare earth elements
