摘要
提出了微光刻图形CIF数据格式到PG3600数据格式转换软件新的图形切割算法,该算法将L-EDIT输出的CIF格式中的四种图形当作任意多边形处理,然后把多边形切割成矩形。与其他算法相比较,该算法简单、切割理想、切割后的矩形数据量比其他算法少很多。并以此算法为基础,编制能够运行于Windows操作系统且又能够挂靠在L-EDIT上的数据格式转换软件。
A novel pattern division algorithm is presented, to transform graphics of CIF format into PG3600 format in microlithography pattern. First, four types of L-EDIT patterns in CIF format are treated as polygons, which are then divided into rectangles. The algorithm is simple and the results are ideal, compared with other algorithms. Besides, the number of rectangles is fewer than other algorithms. Based on the algorithm, the data format transformation software running both on Windows and L-EDIT is made.
出处
《微电子学》
CAS
CSCD
北大核心
2007年第2期207-209,共3页
Microelectronics
基金
国家重点基础研究基金资助项目(G2000036504
2002CB311907
2002AA325040)
国家自然科学基金资助项目(60290081
60276019
90207004
60376020
60236010)
