摘要
设计了一套材料表面改性试验装置,对其放电特性以及由丝状放电向准辉光放电转变的条件进行了试验。利用发射光谱技术和电压电流测试技术,研究了常温常压下空气介质阻挡放电所加电压和输入能量对N2(C3Πu→B3Πg)发射光谱强度的影响。N2(C3Πu→B3Πg)的发射光谱强度随放电电压及输入能量的增加而增强,当电压(频率)和输入能量增大某一值后,N2(C3Πu→B3Πg)的发射光谱强度增强速率变大,介质阻挡放电从丝状放电过渡到准辉光放电模式,产生均匀分布的发光现象,这非常有利于对薄膜和金属材料表面的改性。
An experiment apparatus for materials surface modification was designed. The discharge characteristic and the conditions for transition from filamentary dielectric barrier discharge to homogeneous dielectric barrier discharge were measured. Dielectric barrier discharges （DBD） in air were diagnosed by optical emission spectrometry and voltage-current plot. Relations between high energy electron （=11.03eV） and DBD voltage/input energy were gained by investigating the effect of voltage/input energy on N2（C^3Πu→B^3g） emission intensity. The emission intensity of N2（C^3Πu→B^3g） increases when voltage/input energy of power supply increases, and it has a sharp increasing when the voltage/input energy of power supply increases to some range, in which filamentary dielectric barrier discharges transfer into homogeneous dielectric barrier discharges. The homogeneous low temperature plasma produced by the present apparatus is favorable to surface modification of materials.
出处
《中国表面工程》
EI
CAS
CSCD
2007年第2期11-16,共6页
China Surface Engineering
基金
广东省自然科学基金团队项目
福建省自然科学基金计划资助项目(E0440001
E0640015)
关键词
发射光谱
介质阻挡放电
材料表面改性
optical emission spectrometry
dielectric barrier discharge （DBD）
surface modification of materials
