摘要
介绍了一种基于尺蠖运动原理的纳米级步距压电电动机,提出了一种新型的压电陶瓷驱动电源,并给出了详细的电路原理图。对压电陶瓷进行的动态驱动实验表明,在输入三角波、方波、正弦波等动态信号时,该驱动电源可以很好地跟随输入波形的变化,实现了输入电压为0~5V时,输出电压在0~200V内连续可调,具有40mV的高分辨率和较为理想的静特性。纹波电压小于±10mV,电源在100kHz范围内具有良好的频响特性。
A kind of piezoelectric motor with nano-step, based on the principle of inchworm motion, is introduced in this paper, then a newly developed driving power is presented in detail. Experiments show that when input signals are dynamic, such as triangle wave or square wave, its output can follow input very well. The supply may adjust the voltage output continuously from 0-200 V when the input ranges from 0 to 5 V, with the high resolution of 40 inV. The output ripples are less than ±k10 inV. The frequency response of the driving power is 100 kHz.
出处
《压电与声光》
CSCD
北大核心
2007年第2期158-160,共3页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金资助项目(50105016)
关键词
尺蠖运动
压电陶瓷
驱动电源
纹波
电动机
inchworm motion
piezoelectric actuator
driving power
ripple voltage
motor