摘要
研究紫外纳米压印技术的模板表面修饰工艺,对经过表面修饰的模板与未经修饰的模板得到的不同压印结果,通过大量实验进行对比分析,验证模板表面修饰工艺是有效控制压印结果,确保压印复型精度的关键。
It has the advantages of sub-10nm resolution,low cost and high-throughput. This paper presents the process of template embellishment based on UV-NIL. Compared with the embellished and unembellished template,the process of template embellishment based on UV-NIL is useful in controlling the result of nanoimprint and ensuring the precision of duplication.
出处
《机电一体化》
2007年第2期39-42,共4页
Mechatronics
基金
上海市纳米科技与产业发展促进中心资助项目(0552nm052)
