摘要
为满足生产现场薄膜宽度实时在线测量的需要,设计了并实现了高精度测量薄膜宽度的装置,系统利用稳功率的一字线形激光器照明,采用高分辨率线阵CCD作为传感器,物方远心成像光路接收以消除振动对测量影响,并采用“CPLD+MPU”硬件电路对输出信号处理,以确保测量精度.整个系统设计结构精简,实验证明了系统的可行性与健壮性.
In order to meet the need of real-time measurement, a suit of structare is designed and implemented in appling to measure film＇s width with high accuracy. In this structure, a line laser is adopted as lighting source, high resolution linear CCD is exploited as sensor, and telecentric imaging optical system is designed to remove vibration effects and ensure precision. Moreover, the key technology output signal processing, which is made up of ＂CPLD＋MPU＂, is analyzed. The whole measuring system is compact in architecture. After experiments, the feasibility and robustness of measuring system are verified.
出处
《传感技术学报》
CAS
CSCD
北大核心
2006年第6期2478-2480,共3页
Chinese Journal of Sensors and Actuators
关键词
薄膜宽度
线阵CCD
远心光路
在线检测
CPLD
thin-film width
linear CCD
telecentric optics system
on-line measuring
CPLD
