摘要
此激光平行光管具有以前平行光管的优点,且可以与数字相移干涉仪对接,直接进行波前误差的高精度测量。分别用于三种波长,主波长λ=0.6328μm,另有λ=0.532μm和λ=1.06μm两种波长。基于三级像差理论,得出了采用非球面单透镜的平行光管的光学设计初始参数。以通光口径为Φ300mm、后截距为4616mm物镜为例,分析了不同波长下的波差、球差和有效焦距的变化情况。在其设计、加工、检验和装调上解决了诸多关键技术研制出了此规格的平行光管。最终物镜的波前误差达到0.11λ(λ=0.6328μm)。
The laser collimator not only has the advantages of existing ones, but also can be used to measure wavefront error with high accuracy interferometer. It is applied for three wavelengths, including primary wavelength 0.6328μm, the rests 0.532μm and 1.06μm. Based on the third-order aberration theory, the pre-design parameters of the objective lens with aspheric surface were given. A collimator with clear aperture of 300mm and back focal length of 4616mm （λ=0.6328μm） was designed. Wavefront maps, spherical aberrations and effective focal lengths of the objective under different wavelengths were calculated and analyzed. Several key techniques were solved during its design, fabrication, test and alignment. Such laser collimator was developed through this process. Finally, wavefront error of the objective is 0.11λ （λ=0.6328μm）.
出处
《光电工程》
EI
CAS
CSCD
北大核心
2007年第3期46-49,共4页
Opto-Electronic Engineering
基金
863计划子课题
关键词
应用光学
三级像差理论
非球面透镜
波前误差
激光平行光管
Applied optics
Third-order aberration theory
Aspheric lens
Wavefront errors
Laser collimators
