摘要
磷化氢(PH3)是一种重要的电子特气,主要用于n型半导体的掺杂、离子注入和化学气相沉积(CVD)等。此外,它在粮食熏蒸、含磷化合物的合成、含磷玻璃及太阳能电池等领域中也有广泛的应用。综述了磷化氢的工业合成方法,主要有化学法、电解法和微波法3类,其中化学法又分为热解法、酸法、碱法和水解法等。为满足电子工业高纯度的需求,需对磷化氢进行精制。总结了磷化氢的精制方法,主要有吸附法、低温精馏法和膜分离法等。同时介绍了磷化氢的国内外技术经济概况和产品规范。
Phosphine （PH3 ）is an important electronic specific gas which is mainly used in fields of N -type semiconductor doping,ion implement and chemical vapor deposition（ CVD） etc. It can also be widely used in foodstuffs fumigation, the synthesis of phosphorous compounds, phosphorous glass, solar cell and so on. The industrial synthesis methods of phosphine were summarized, which included chemical synthesis method, electrolysis method and microwave method. The chemical synthesis method is divided into thermolysis method,acidic method,basic method and hydrolysis method. In order to meet the high purity demand of electronic industry, it must be purified. The purification methods of phosphine include adsorption method,low temperature distillation method and membrane separation method etc. The product specifications and economic profile of phosphine at home and abroad are aslo introduced.
出处
《无机盐工业》
CAS
北大核心
2007年第3期11-14,共4页
Inorganic Chemicals Industry
关键词
磷化氢
半导体工业
掺杂剂
熏蒸剂
phosphine
semiconductor industry
dopant
fumigant
