摘要
聚焦离子束技术(FIB)是一种集形貌观测、定位制样、成份分析、薄膜淀积和无掩模刻蚀各过程于一身的新型微纳加工技术。几十年来,随着关键技术的不断突破和完善,得到了前所未有的发展,所突破的关键技术之一就是精密工件台的使用。
Focused Ion Beam is an advanced micro/nano technology for figure observation, orientation making-sample, component analysis, film deposition and masldess etching. With the development and breakthrough of FIB key technology for many years, its technology has reach a high level. The one of these key technology is exact technology of workpiece stage. In this paper, the workpiece-stage and control system in focused ion beam equipment are introduced in detail.
出处
《电子工业专用设备》
2007年第3期39-42,60,共5页
Equipment for Electronic Products Manufacturing
关键词
聚焦离子束
工件台
微纳加工
Focused Ion Beam
Workpiece-Stage Micro/Nano Fabrication-Technology
