摘要
在850nm波长垂直腔面发射激光器的基础上制备了纳米孔径垂直腔面发射激光器.当小孔尺寸为400nm×400nm时,在25mA驱动电流下,其最大输出光功率达到了0.3mW,功率密度约为2mW/μm2.文中介绍了纳米孔径垂直腔面发射激光器的制备工艺,并对它的光谱特性和寿命特性进行了分析.
Nano-aperture vertical-cavity surface-emitting lasers were fabricated on common 850nm VCSELs. When the size of the aperture was 400nm × 400nm,the maximum far-field output power reached 0.3mW at a driving current of 25mA,and the power density was about 2mW/μm^2 . The fabrication process is introduced here. Spectra and lifetime characteristics of the devices are also analyzed.
基金
中国科学院知识创新工程和国家高技术研究发展计划(批准号:2002AA313060)资助项目~~
