摘要
介绍了微细群电极的应用情况,分别给出了LIGA方法、电火花超声复合反拷加工法和电火花线切割加工法制作群电极的工作原理,并对这些工艺的特点进行了归纳,给出了具有代表性的加工实例,最后介绍了微细群电极的封装技术。
The definition of micro-electrode array is given, its concrete application is presented. The working mechanism of technologies for micro-electrode array fabrication, include LIGA, micro- EDM enhanced by ultrasonic vibration and micro-WEDM, are introduced, their advantages and disadvantages are summed up, representative machining examples are given. At last, the encapsulation technology of micro-electrode array is introduced.
出处
《电加工与模具》
2007年第1期6-9,33,共5页
Electromachining & Mould
