摘要
为了实现对光学非球面的低成本在线测量,在比较和分析现有非球面检测技术的基础上,设计并制作了一种小型径向剪切干涉仪用于检测非球面透镜。基于波带板可以聚焦成像的原理,该干涉仪采用不同焦距的双波带板产生径向剪切干涉。波带板由工业缩微矢量图制版技术设计和制作而成,并通过实验验证了该波带板的聚焦精度。采用傅里叶变换条纹相位分析法对干涉条纹进行处理,计算出波相差和波面面形。实验中给出了平面波光束经过一个非球面透镜后的波面面形检测结果和误差分析,使用该技术对标准非球面进行测试,波差峰谷值(P-V)达到了λ/5的精度,均方差(RMS)达到λ/10的精度。结果表明,该干涉仪具有体积小、抗干扰能力强等特点,适用于对小型非球面透镜进行在线检测。
Aspheric surface testing technique with radial shearing interferometer has been developed. The principle of the measurement is based on the radial shearing interference in which the measuring wavefront from the entire mirror surface under test is referred to that of the central part. The compact and low-cost radial shearing interferometer is constructed with two Fresnel zone plates, which are designed and fabricated by photographic processing. Radial shearing interferogram is detected by a CCD camera and processed by a computer. Fringe phase of shearing interferogram is evaluated by fast Fourier transform （FFT） algorithm and testing wavefront is reconstructed. The measurement for standard lens show the accuracy to be around λ/5 P-V and λ/10 RMS. The experiments show that this stable interferometer can be applicable to the in-process measurement for aspheric lens.
出处
《激光技术》
CAS
CSCD
北大核心
2007年第1期37-40,46,共5页
Laser Technology
关键词
仪器测量与计量
剪切干涉
波带板
非球面
instrumentation measurement and metrology
sheafing interference
zone plate
aspheric surface
