摘要
提出了将环路径向剪切干涉(CRSI,Cyclic Radial Shearing Interferometry)术应用于光学元件面形检测的新方法。设计了基于环路径向剪切干涉检测光学元件面形的光路系统。根据环路径向剪切干涉法的波前重建算法,模拟计算了任意波前的重建情况,同时在基于开普勒望远系统的环路径向剪切干涉仪上实际测量了一个已知光学元件的面形。结果表明,文中提出的波前重建算法和采用的光路系统可用于实际光学元件面形的准确检测,系统的重复性也得到了研究。
A method for optics measurement based on the cyclic radial sheafing intederometry is proposed. The optical system for optics measurement is designed based on this technique. According to the wavefront reconstruction algorithm of the cyclic radial shearing interferometry, the reconstruction of a arbitrary wavcfront is implemented from the corresponding CRSI interferogram. And experiments have been done successfully to measure the surface of a practical optics based on Keplerlan tdescope system. The results show that both the wavefront reconstruction algorithm and the optical system are able to exactly test the optics surface. And the repeatability of the setup is analyzed.
出处
《激光杂志》
CAS
CSCD
北大核心
2007年第1期39-40,共2页
Laser Journal
关键词
光学测量
环路径向剪切干涉
波前重建
面形测量
optical measurement
cyclic radial sheafing intefferemetry
wavefront reconstruction
surface shape measurement
