摘要
采用sol-gel法制备了Ba0.6Sr0.4TiO3薄膜。探讨了溶胶中醋酸和乙二醇用量对BST晶化温度和物相的影响,配制出了晶化温度低且无杂相的BST溶胶,对比了退火升温速率对BST薄膜形貌的影响。发现在低速率升温条件下生长的薄膜致密、均匀一致,无气孔、裂纹。测试了薄膜的介电调谐性能,在室温1 MHz下,BST薄膜的εr、tanδ和T分别为592,0.025和42%。
BST thin films were fabricated by sol-gel method. The effect of the content of acetic acid and ethylene glycol on crystallization temperature and phase of BST was discussed. BST solution with low crystallization temperature and without second phase was prepared. The effect of annealing heating-up speed on the surface morphology of BST thin films was investigated. Surface morphology of BST thin films fabricated at low annealing heating-up speed is dense and smooth without any pores and cracks. Dielectric tunable properties of BST thin films were measured at room temperature and 1MHz. The εr, tan δand T of BSTthin films are 592, 0.025 and 42 %, respectively.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2007年第1期40-42,45,共4页
Electronic Components And Materials
基金
国家自然科学基金资助项目(50125309)
