摘要
本文综述了国内外低温和室温合成金刚石薄膜的发展现状和动态，介绍了几种典型的低温和室温合成金刚石薄膜的方法及工艺特点，给出了低温合成金刚石薄膜的一些基本规律。
Present status and recent trends in low and room temperature deposition ofdiamond thin films are reviewed. Several typical methods of low and room temperature deposition of diamond films. are introduced. Fundamental laws of lowtemperature growth of diamond films are summarized.
出处
《微细加工技术》
1996年第2期65-70,共6页
Microfabrication Technology
关键词
金刚石薄膜
低温沉积
薄膜生长
金刚石
diamond thin films
low temperature deposition
film growth
