摘要
建立了高增益PID闭环控制系统,在“直流伺服电机+滚珠丝杠”驱动机构上实现了大范围的纳米定位。对于“伺服电机+滚珠丝杠”驱动系统来说,摩擦是实现纳米定位精度的主要障碍,它影响着系统微动特性并导致稳态误差。针对这种驱动系统,在根据标定参数计算得到的线性传递函数的基础上,设计高增益不完全微分、比例反馈PID控制器,配置闭环控制系统的极点为负实轴上的多重极点,避免了摩擦力建模和补偿。实验结果表明,该高增益闭环控制系统有效地抑制了摩擦等非线性因素的影响,在系统的宏动和微动特性阶段都可以实现单步的纳米定位并取得了一致的响应,10 nm^10 mm阶跃响应的稳态误差不超过±2 nm。
Nanometer positioning was realized in a DC-motor and ball-screw-driven stage by a high gain controller. With effecting of friction on microdynamic characteristics and steadystate errors of the stage,it is a major obstacle to the achievement of nanometer positioning. In this paper, a high gain PID control structure was designed with proportional and derivative terms placed in the feedback path. Controller parameters were calculated by multiple closed-loop poles, placement according to the macrodynamics alone and no friction modeling and compensation were necessary. Experimental and simulated results indicate that the PID controller can provide a sufficiently high loop gain to suppress friction effect so that single-step nanometer positioning and uniform responses of micro-motion and macro mo tion are achieved. In point-to-point positioning for step heights from 10 nm to 10 ram, the positioning error is within ±2 nm.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2007年第1期63-68,共6页
Optics and Precision Engineering
基金
日本东京工业大学资助项目
关键词
滚珠丝杠
PID控制器
纳米定位
摩擦
ball screw
PID controller
nanometer positioning
friction
