摘要
微镜是微电子机械系统(MEMS)光开关的关键结构,镜表面粗糙度对微镜反射率、插入损耗等特性影响重大。给出了用扫描隧道显微镜测量的一组微镜的表面形貌,进而将分形理论应用在微镜表面的分析上,同时一种三维的Weierstrass-Mandelbrot(W-M)函数被用以模拟各种不同的表面形貌。结果对比表明,这种W-M函数可用于微镜表面的建模和形貌分析。
Micro-mirror is a key structure of microelectromechanica system（MEMS） optical switch. Surface roughness plays an important role in reflectivity, insertion loss, etc. The topographies of various micro-mirror surfaces have been measured by scanning tunneling microscope. These rough surfaces have been analyzed by a fractal theory, and a three-dimensional Weierstrass-Mandelbrot（W-M） function has been used to simulate the topographies of the rough surfaces. The result shows that the W-M function is efficient in creating models and analyzing the topography of MEMS surface.
出处
《半导体光电》
EI
CAS
CSCD
北大核心
2006年第6期672-674,共3页
Semiconductor Optoelectronics
基金
教育部春晖计划项目
重庆邮电大学博士启动基金项目(A2005-50)
