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非晶Ge-S半导体薄膜的研制

THE RESEARCH OF AMORPHOUS SEMICONDUCTOR Ge-S FILMS
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摘要 我们用高温熔融和空气中碎火的方法制取了非晶 Ge-S 块状材料,又以该材料为蒸发源材料,用热蒸发方法制备非晶 Ge-S 薄膜。对不同配方比的薄膜进行了光、电性能测试并分析和讨论了测试结果,得出了光学禁带宽度与硫含量的关系。 The authors prepared amorphous Ge-S bulk materials by a method of high temperature melting with air quenching and then they take it as a vaporization soures by hearting vaporization method to prepare amorphous Ge-S film.Optical and electrical properties of the film for various componsition of sulfur are measured.The results are analysised and discussed.Finally,the relationship between the width of the optical for- bidden band and concentrations of sulfur are obtained.
出处 《电子科技大学学报》 EI CAS CSCD 北大核心 1989年第4期368-373,共6页 Journal of University of Electronic Science and Technology of China
关键词 非晶态 半导体 薄膜 Ge-S amorphous semiconductor chalcogenide glass semiconductor localized state width of optical forbidden band optical absorption coefficient
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参考文献1

  • 1H. Tichá,V. Andr?,L. Tichy,A. T?íska. Electrical properties of glassy Ge20S80[J] 1985,Journal of Materials Science Letters(8):960~962 被引量:1

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