摘要
采用阳极氧化的方法分别在浓度2%和4%的草酸体系下对金属铝基板表面进行了绝缘化处理。通过SEM对绝缘膜层进行了研究分析,并测试了膜层的介电性能。结果表明:浓度4%的草酸体系下得到的绝缘膜表面存在直径80nm左右的针状物,它可能是膜表面形成的Al(OH)3水合物。较大浓度的草酸电解液的溶解作用加剧了膜层断面开裂、膜质疏松等缺陷,严重影响着膜层的介电性能。
Anode oxidation method, was employed to treat aluminum substrate in order to get an insulating surface by form a layer of aluminum oxide （Al2O3） film under the oxidation condition of using a oxalic acid solution of 2% and 4% concentration as the electrolyte respectively. Microstructures of thin films prepared by different oxidation conditions were analyzed by Scanning Electron Micrograph （SEM） ; dielectric properties were evaluated using high resistance meter and voltage resistance meter respectively. Experimental results show： Lots of acicular substance on surface of films under the oxidation condition of solution of 4% concentration, diameter of which is about 80nm, may be hydrates of Al（OH）3 absorbed on surface of films. Under the condition of solution of higher concentration, the effect of oxalic acid dissolving films enhances, making cross--section of films rupturing and making films loosening, which debases dielectric properties of films consumedly.
出处
《山东陶瓷》
CAS
2006年第6期3-6,共4页
Shandong Ceramics
基金
南京航空航天大学科研启动基金资助(S0466-061)
关键词
铝基板
草酸
阳极氧化
介电性能
Aluminium Metal Substrate
Oxalic Acid
Anode Oxidation
Dielectric Properties
