摘要
三维轮廓测量是当前光学研究领域中非常活跃的一个技术分支,其中位相测量轮廓术(PMP)在求解中严格遵循物像共轭关系,具有较高的测量精度。DMD器件的出现,更推进了PMP技术的发展。本文重点讨论了位相测量轮廓术(PMP)测量中的典型问题,介绍了PMP的应用现状。
The 3D shape measurement is one of the most active branches of optical research areas recently. The phase measuring profilometry （PMP） can achieve high measuring accuracy since there exists the strict object-to-image mapping in the optical configuration. Combined with digital mirror device （DMD）, PMP technology gets rapid progress. In this paper, the existing technical challenges of PMP are introduced, and the current application of PMP is briefly reviewed.
出处
《工具技术》
北大核心
2006年第11期71-74,共4页
Tool Engineering
关键词
光学三维轮廓测量
位相检测
数字微镜器件
optical 3D shape measurement, phase measuring profilometry （PMP）, digital mirror device （DMD）
